Atomic layer deposition of chromium oxide - An interplay between deposition and etching

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作者：
Mandol, Bireswar [1 ]
Mahuli, Neha [2 ]
Ohno, Kenichi [3 ]
Scudder, Lance [3 ]
Sarkar, Shaibal K. [1 ]
机构：
[1] Department of Energy Science and Engineering, Indian Institute of Technology Bombay, Mumbai,400076, India
[2] Center for Research in Nanotechnology and Science, Indian Institute of Technology Bombay, Mumbai,400 076, India
[3] Applied Materials Inc., 3050 Bowers Ave., Santa Clara,CA,95054, United States
来源：
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2021年 / 39卷 / 03期
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