Design and analysis of piezo actuated flexure guided nanopositioning stage

被引：3
|
作者：
Pankaj [1 ]
Chandra, Vikash [1 ,2 ]
Murat, Ram [3 ]
Kumar, Viresh [3 ]
机构：
[1] CSIR-Central Scientific Instruments Organisation (CSIR-CSIO), Chandigarh,160030, India
[2] Academy of Scientific and Innovative Research (AcSIR), CSIR-Central Scientific Instruments Organisation (CSIR-CSIO) Campus, Chandigarh,160030, India
[3] Chandigarh College of Engineering and Technology (Degree Wing), Chandigarh,160019, India
来源：
Materials Today: Proceedings | 2023年 / 80卷
关键词：
D O I：
10.1016/j.matpr.2023.01.405
中图分类号：
学科分类号：
摘要：
36
引用
收藏
页码：327 / 332
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