Probe Error Correction Method for Nano-precision On-machine Measurement Systems

被引：0
|
作者：
Guo X. [1 ]
Xu W. [1 ]
Wang D. [1 ]
Li R. [1 ]
Yin S. [1 ]
机构：
[1] National Engineering Research Center for High Efficiency Grinding, Hunan University, Changsha
来源：
Zhongguo Jixie Gongcheng/China Mechanical Engineering | 2022年 / 33卷 / 09期
关键词：
Error correction; Nano-precision; On-machine measurement; Ultra-precision machine tool;
D O I：
10.3969/j.issn.1004-132X.2022.09.010
中图分类号：
学科分类号：
摘要：
Aiming at the problems that the probe errors affected the measurement accuracy in two axis linkage contact on-machine measurement of ultra precision machine tools, a correction method of probe radius errors and shape errors was proposed. On-machine measurement experiments were conducted. Measurement results for three cases of uncorrected probe errors, corrected probe radius errors and corrected probe shape errors were compared with Taylor Hobson PGI840's off-line measurement results, and the effectiveness of the probe shape error correction method was verified. After the correction of probe shape errors, the surface form accuracy PV value changes from 420 nm to 370 nm, which shows a deviation of 10 nm compared with the off-line measurement PV value of 380 nm. Results show that the probe error correction method for on-machine measurement systems is effective, which may improve the on-machine measurement accuracy. © 2022, China Mechanical Engineering Magazine Office. All right reserved.
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页码：1084 / 1089
页数：5
相关论文
共 12 条
  • [1] HOCKEN R J, CHAKRABORTY N, BROWN C., Optical Metrology of Surfaces, CIRP Annals, 54, 2, pp. 169-183, (2005)
  • [2] DOBOSZ M, WOZNIAK A., CMM Touch Trigger Probes Testing Using a Reference Axis, Precision Engineering, 29, 3, pp. 281-289, (2005)
  • [3] SHIRAISHI M., Scope of In-process Measurement, Monitoring and Control Techniques in Machining Processes-Part 1: In-process Techniques for Tools, Precision Engineering, 10, 4, pp. 179-189, (1988)
  • [4] ARAI Y, SHIBUYA A, YOSHIKAWA Y, Et al., Online Measurement of Micro-aspheric Surface Profile with Compensation of Scanning Error, Key Engineering Materials, 381, 382, pp. 175-178, (2008)
  • [5] SHIMIZU Y, GOTO S, LEE J C, Et al., Fabrication of Large-size SiC Mirror with Precision Aspheric Profile for Artificial Satellite, Precision Engineering, 37, 3, pp. 640-649, (2013)
  • [6] GAO W, TANO M, ARAKI T, Et al., Measurement and Compensation of Error Motions of a Diamond Turning Machine, Precision Engineering, 31, 3, pp. 310-316, (2007)
  • [7] LI D, JIANG X Q, TONG Z, Et al., Kinematics Error Compensation for a Surface Measurement Probe on an Ultra-precision Turning Machine, Micromachines, 9, 7, (2018)
  • [8] CHEN F J, YIN S H, HUANG H, Et al., Profile Error Compensation in Ultra-precision Grinding of Aspheric Surfaces with On-machine Measurement, International Journal of Machine Tools and Manufacture, 50, 5, pp. 480-486, (2010)
  • [9] ZHU W L, YANG S, JU B F, Et al., On-machine Measurement of a Slow Slide Servo Diamond-machined 3D Microstructure with a Curved Substrate, Mea-surement Science & Technology, 26, 7, (2015)
  • [10] LI Ang, WANG Yonggang, WU Zhiqiang, Et al., Data Processing of High-order Aspheric Surface Measurements Using CMM in Optical Fabrication, Chinese Optics, 13, 2, pp. 302-312, (2020)
12