Research on time-controlled grinding methods for fabricating high-precision optical components

被引：0
|
作者：
Sun Z. [1 ,2 ,3 ]
Chen F. [1 ,2 ,3 ]
Hu H. [1 ,2 ,3 ]
Dai Y. [1 ,2 ,3 ]
Guan C. [1 ,2 ,3 ]
Peng X. [1 ,2 ,3 ]
机构：
[1] College of Intelligence Science and Technology, National University of Defense Technology, Changsha
[2] Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha
[3] Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha
来源：
Zhongguo Kexue Jishu Kexue/Scientia Sinica Technologica | 2023年 / 53卷 / 08期
关键词：
deterministic figuring; high efficiency; optical components; time-controlled grinding;
D O I：
10.1360/SST-2023-0135
中图分类号：
学科分类号：
摘要：
Owing to its low processing efficiency, the traditional milling–polishing–figuring process cannot meet the increasing demand for high-precision and large-diameter optical components. To increase the efficiency related to the manufacturing of optical components and enable the components to rapidly achieve the entrance conditions of the final figuring process, this paper introduces a flexible abrasive belt grinding tool for realizing the deterministic machining of optical components. Based on the material removal mechanism of time-controlled grinding of optical components, a new material removal method is proposed, and an efficient and controllable removal function is successfully obtained by controlling key processing parameters. A time-controlled grinding prototype for fabricating optical components was built according to theoretical analysis, and time-controlled grinding experiments were conducted on a 200 × 200 mm flat glass ceramic. The results showed that the surface error converged from 2.31 μm PV, 0.38 μm RMS to 1.76 μm PV, 0.27 μm RMS in 53 min. The efficiency of the prototype is >10 times that of a magnetorheological polishing wheel of the same size. Time-controlled grinding can enable the quick polish of the glass ceramic surface while figuring, meeting the laser interferometry requirements. These results verify the feasibility of the error convergence via the time-controlled grinding method of an optical component, which can shorten the grinding and polishing time before the final figuring process. © 2023 Chinese Academy of Sciences. All rights reserved.
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页码：1302 / 1312
页数：10
相关论文
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