Research progress of on-chip integrated optical sensing technology (Invited)

被引：0
|
作者：
Chen Q. [1 ]
Nan X. [1 ]
Liang W. [1 ]
Zheng Q. [1 ]
Sun Z. [1 ]
Wen L. [1 ]
机构：
[1] Institute of Nanophotonics, Jinan University, Guangzhou
来源：
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering | 2022年 / 51卷 / 01期
关键词：
Integrated optics; Lab on a chip; Optical sensing; Optical waveguide; Photodetection;
D O I：
10.3788/IRLA20210671
中图分类号：
学科分类号：
摘要：
Optical sensing technology has been widely used because of its advantages of high precision, low delay and imaging. With the rapid development of information technology such as big data and Internet of things, the demand for miniaturization and portability of optical detection and inspection platform is becoming more and more urgent. In order to overcome the dependence on large-scale special equipment and improve the applicability of on-site rapid detection and light-load platform application scenarios, in recent years on-chip integrated optical sensing technology has attracted great attention. With the integration of optical source, optical sensing and photoelectric detection units, as well as the development of on-chip light dispersion technology, the on-chip integration of optical sensing signal extraction and photoelectric signal conversion can be effectively realized, which contributes to the realization of the miniaturization and multi-functional integration. The relevant technical principles and technology development status were introduced, the pros and cons of the existing techniques were discussed, and the future development direction and application prospects were summarized. Copyright ©2022 Infrared and Laser Engineering. All rights reserved.
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