BEOL Integrated Ferroelectric HfO-Based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions

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NaMLab GGmbH, Dresden [1 ]
01187, Germany
不详 [2 ]
38000, France
不详 [3 ]
01187, Germany
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IEEE J. Electron Devices Soc. | 2022年 / 907-912期
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欧盟地平线“2020”;
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