PLASMA SYNTHESIS WITH OPPOSING ELECTRON AND ION GUNS

被引:6
|
作者
MADDIX, HS
CHORNEY, P
PAIK, SF
机构
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1969年 / 40卷 / 11期
关键词
D O I
10.1063/1.1683830
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:1471 / &
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