OPTIMIZED PROCEDURE FOR THE MANUFACTURE OF THIN-FILM FILTER PROTOTYPES

被引:0
|
作者
BOSCH, S
机构
[1] Departament de Física Aplicada i Electrònica, Universitat de Barcelona, Barcelona, E-08028
来源
关键词
68.55.+b; 78.65.-s; 81.15.Ef;
D O I
10.1007/BF00324167
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A simple procedure to minimize the number of trial-and-error high-vacuum depositions required to manufacture a thin film filter prototype is presented. For optical coatings obtained by thermal evaporation, the main difficulty is the accurate characterization (refractive index and thickness) of the layers under the actual deposition conditions. The proposed method is able to describe dispersion as well as inhomogeneity in the refractive index of the component layers. It requires only a suitable substrate holder attachment and standard thin film measurement equipment: a spectrophotometer and a three wavelength ellipsometer. The technique is illustrated with the development of an anti-reflection (AR) coating for glass which also includes an inhomogeneous layer.
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页码:431 / 436
页数:6
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