GLASS-CERAMIC INTERACTIONS AND THICK-FILM METALLIZATION OF ALUMINUM NITRIDE

被引:15
|
作者
NORTON, MG [1 ]
机构
[1] IMPERIAL COLL SCI TECHNOL & MED,DEPT MAT,LONDON SW7 2BP,ENGLAND
关键词
D O I
10.1007/BF01130176
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A frit-bonded thick-film metallization for aluminum nitride (AIN) ceramic substrates has been developed. The glass system is thermodnamically stable with respect to AIN at the temperatures employed during thick-film processing. The model glass, a lithium borate, has comparable physical properties to that of the standard lead borosilicate glasses used in frit-bonded films designed for oxide ceramics. The wetting properties of the glass on AIN, in both air and nitrogen atmospheres, have been determined by use of a hot-stage microscope. The low-temperature oxidation of the AIN surface was found to be a significant factor in the glass spreading rate. The glass was formulated into a palladium-silver thick-film metallization and the performance of this material on three types of AIN substrate was determined. Examination of the film morphology and the fracture surfaces was carried out using scanning electron microscopy.
引用
收藏
页码:2322 / 2328
页数:7
相关论文
共 50 条
  • [1] THICK-FILM GLASS-CERAMIC CAPACITORS
    BIGGERS, JV
    MARSHALL, GL
    STRICKLER, DW
    SOLID STATE TECHNOLOGY, 1970, 13 (05) : 63 - +
  • [2] THICK-FILM GLASS-CERAMIC CAPACITORS
    BIGGERS, JV
    STRICKLER, DW
    MARSHALL, GL
    AMERICAN CERAMIC SOCIETY BULLETIN, 1968, 47 (04): : 393 - +
  • [3] THERMODYNAMIC CONSIDERATIONS IN THE THICK-FILM METALLIZATION OF ALUMINUM NITRIDE SUBSTRATES
    NORTON, MG
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1990, 9 (01) : 91 - 93
  • [4] ADHESION STRENGTH OF THICK-FILM PLATINUM CONDUCTORS ON GLASS-CERAMIC NITRIDE AND OXIDE CERAMICS
    CHEN, KC
    FU, SL
    MACKENZIE, JD
    AMERICAN CERAMIC SOCIETY BULLETIN, 1981, 60 (09): : 932 - 932
  • [5] Investigation of sensing performances of thick-film resistors sintered on fluorophlogopite glass-ceramic substrates
    Wen, Ming
    Guan, Xinchun
    SENSORS AND ACTUATORS A-PHYSICAL, 2024, 370
  • [6] Study of copper thick film metallization on aluminum nitride
    Hlina, Jiri
    Reboun, Jan
    Hamacek, Ales
    SCRIPTA MATERIALIA, 2020, 176 (176) : 23 - 27
  • [7] LASER TRIMMING OF THICK-FILM RESISTORS ON ALUMINUM NITRIDE SUBSTRATES
    KURIHARA, Y
    TAKAHASHI, S
    YAMADA, K
    KANAI, K
    ENDOH, T
    IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1990, 13 (03): : 596 - 602
  • [8] Taming thick-film nitride
    Lefevre, D
    Hope, M
    Czerniak, M
    SOLID STATE TECHNOLOGY, 1999, 42 (03) : S7 - +
  • [9] THICK-FILM NICKEL METALLIZATION FOR ELECTRONIC CIRCUITS
    SHIH, TT
    PUKAITE, CJ
    AMERICAN CERAMIC SOCIETY BULLETIN, 1977, 56 (03): : 326 - 326
  • [10] LASER TRIMMING OF THICK-FILM METAL RESISTORS ON ALUMINUM NITRIDE SUBSTRATES
    KURIHARA, Y
    TAKAHASHI, S
    YAMADA, K
    KOBAYASHI, R
    KANAI, K
    ENDOH, T
    IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1991, 14 (01): : 204 - 210