ELECTROSTATIC STABILIZATION OF METAL DROP FOR ELECTRON-BEAM EVAPORATION IN DIODE GUN

被引：0
|
作者：
PROTSENKO, IE
SHAMONYA, VG
YAREMENKO, AV
YAREMENKO, LA
机构：
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1991年 / 34卷 / 02期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The authors describe a method for deposition of coatings of low-vapor-pressure metals by an electron-beam diode gun based on stabilization of the melted drop in the cathode plane by electric fields applied to the anode and substrate. Working voltages are given for molybdenum and niobium coatings up to 1-mu-m thick at condensation rates of 0.3 and 0.02-mu-m/min, respectively.
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页码：461 / 462
页数：2
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