EXPERIMENTAL STUDY OF GROWTH KINETICS OF VAPOR-DEPOSITED THIN METAL-FILMS

被引：42
|
作者：
ROBINS, JL
DONOHOE, AJ
机构：
来源：
THIN SOLID FILMS | 1972年 / 12卷 / 02期
关键词：
D O I：
10.1016/0040-6090(72)90086-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：255 / &
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