MONTE-CARLO SIMULATIONS OF THE POINT-TO-POINT RESOLUTION IN SCANNING AUGER MICROSCOPY AND X-RAY-MICROANALYSIS OF THIN OVERLAYERS

被引：5
|
作者：
VALAMONTES, E
NASSIOPOULOS, AG
GLEZOS, N
机构：
[1] Microelectronics Institute, Ncsr. ‘Democritos’, Athens, PO Box 60228
来源：
SURFACE AND INTERFACE ANALYSIS | 1992年 / 19卷 / 1-12期
关键词：
D O I：
10.1002/sia.740190178
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The point-to-point resolution of Auger electron spectroscopy is compared to that of x-ray microanalysis of thin unsupported films and of thin films on a bulk material. Monte-Carlo calculations are used in this respect. The incident beam is a Gaussian-distributed curve with standard deviation sigma(o) = 40 angstrom and an energy range 10-100 keV. A Point-Spread-Function describing the radial distribution of the analysed signal is, in each case, determined from the Monte-Carlo results. From this function and by using the Rayleigh criterion, the point-to-point resolution is calculated.
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页码：419 / 422
页数：4
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