ACOUSTIC METHOD OF INVESTIGATING THE SURFACE-POTENTIAL IN SEMICONDUCTORS - STUDY OF THE GAP-TE(110) REAL SURFACE

被引:9
|
作者
PUSTEINY, T
机构
关键词
SEMICONDUCTORS; ULTRASONIC INSPECTION; SURFACE POTENTIAL; GAP-TE CRYSTALS;
D O I
10.1016/0041-624X(94)00040-V
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
An acoustic method of the surface potential determination in semiconductors is described. The method is based on the transverse acoustoelectric effect in the layered piezoelectric waveguide-semiconductor structure. The paper presents experimental results of the surface potential investigations obtained after various surface treatments in a GaP:Te (110) single crystal. Strong influence of chemical and mechanical surface treatments upon the surface potential values are observed. The surface potential values obtained by the presented method ranged, approximately, from -0.17 +/- 0.01 V up to +0.08 +/- 0.01 V. It follows from measurements that the method may give important information about the surface potential of the semiconductor crystals in the high frequency range.
引用
收藏
页码:289 / 294
页数:6
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