INFLUENCE OF HYDROGEN ON THE STRUCTURE OF AMORPHOUS-CARBON

被引：38

作者：

TANG, XM ^{[1
]}

WEBER, J ^{[1
]}

BAER, Y ^{[1
]}

MULLER, C ^{[1
]}

HANNI, W ^{[1
]}

HINTERMANN, HE ^{[1
]}

机构：

[1] CTR SUISSE ELECTR & MICROTECH SA, CH-2000 NEUCHATEL, SWITZERLAND

来源：

PHYSICAL REVIEW B | 1993年 / 48卷 / 14期

关键词：

D O I：

10.1103/PhysRevB.48.10124

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have studied the influence of hydrogen on the structure of a-C:H films (produced by sputtering) by measuring the stress, hardness, and Raman spectrum as a function of the hydrogen concentration C(H). Addition of hydrogen, on the one hand, reduces the stress and hardness, and on the other hand, reduces the intensity ratio (I(D)/I(G)) of the Raman D to G line. Discontinuous change of both stress and I(D)/I(G), and a minimum of the G-line full width at half maximum have been observed at C(H) almost-equal-to 32.5 at. %. Scanning-electron-microscopy analysis has been used to verify the stress transition. The role of hydrogen is discussed.

引用

页码：10124 / 10128

页数：5

共 50 条

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