ELLIPSOMETRIC MEASUREMENTS OF ULTRATHIN OXIDE-FILMS ON SI

被引：0
|
作者：
KRAGLER, G [1 ]
MUNZ, P [1 ]
BUCHER, E [1 ]
机构：
[1] UNIV CONSTANCE,FAK PHYS,D-7750 CONSTANCE,FED REP GER
来源：
HELVETICA PHYSICA ACTA | 1980年 / 53卷 / 04期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
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页码：639 / 643
页数：5
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