INSPECTION OF COMPLETE VLSI CHIPS WITH A HIGH-RESOLUTION IMAGE RECORDING-SYSTEM AND LARGE AREA SEM

被引：1
|
作者：
RAO, VRM
NIXON, WC
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期
关键词：
D O I：
10.1116/1.570313
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1861 / 1863
页数：3
相关论文
共 50 条
  • [1] DESIGN CONSIDERATIONS FOR A FLEXIBLE HIGH-RESOLUTION FILM RECORDING-SYSTEM
    PIERSON, PB
    [J]. OPTICAL ENGINEERING, 1981, 20 (03) : 344 - 350
  • [2] THE UTILITY OF AN ONLINE DIGITAL IMAGE RECORDING-SYSTEM FOR SEM
    OHO, E
    KANAYA, K
    [J]. SCANNING, 1990, 12 (03) : 141 - 146
  • [3] A HIGH-RESOLUTION FLYING MAGNETIC DISK RECORDING-SYSTEM WITH ZERO REPRODUCE SPACING LOSS
    GOOCH, B
    NIEDERMEYER, R
    WOOD, R
    PISHARODY, R
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) : 4549 - 4554
  • [4] High-resolution wafer inspection using the 'in-lens SEM'
    Hitachi, Ltd, Hitachinaka-shi, Japan
    [J]. IEICE Trans Electron, 3 (317-323):
  • [5] High-resolution wafer inspection using the ''in-lens SEM''
    Mizuno, F
    Yamada, S
    Ohtaka, T
    Tsumaki, N
    Koike, T
    [J]. IEICE TRANSACTIONS ON ELECTRONICS, 1996, E79C (03) : 317 - 323
  • [6] Large-area, high-resolution image analysis of composite materials
    Davidson, NC
    Clarke, AR
    Archenhold, G
    [J]. JOURNAL OF MICROSCOPY-OXFORD, 1997, 185 : 233 - 242
  • [7] Digital recording system for high-resolution radar
    Motty, S
    Johnson, M
    [J]. 1997 CANADIAN CONFERENCE ON ELECTRICAL AND COMPUTER ENGINEERING, CONFERENCE PROCEEDINGS, VOLS I AND II: ENGINEERING INNOVATION: VOYAGE OF DISCOVERY, 1997, : 843 - 846
  • [8] A HIGH-RESOLUTION WAVEFORM-RECORDING SYSTEM
    MUHLEMEIER, B
    PARISI, J
    BUCK, W
    [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1984, 17 (01): : 78 - 82
  • [9] NANOFABRICATION TOWARD HIGH-RESOLUTION AND LARGE AREA
    Qiao, Wen
    Pu, Donglin
    Chen, Lin-Sen
    [J]. 2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021), 2021, : 42 - 46
  • [10] Image Browsing on Large High-Resolution Displays
    Hoppe, Mattias
    Lischke, Lars
    Boldh, Robin
    Weber, Dominik
    Strauss, Jan
    Henze, Niels
    [J]. 16TH INTERNATIONAL CONFERENCE ON MOBILE AND UBIQUITOUS MULTIMEDIA (MUM 2017), 2017, : 401 - 405
12345