OPTICAL AND STRUCTURAL CHARACTERISTICS OF AL2O3 FILMS DEPOSITED BY THE REACTIVE IONIZED CLUSTER BEAM METHOD

被引：10
|
作者：
HASHIMOTO, H [1 ]
LEVENSON, LL [1 ]
USUI, H [1 ]
YAMADA, I [1 ]
TAKAGI, T [1 ]
机构：
[1] KYOTO UNIV,ION BEAM ENGN EXPTL LAB,SAKYO KU,KYOTO 606,JAPAN
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 01期
关键词：
D O I：
10.1063/1.340506
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：241 / 244
页数：4
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