RF DISCHARGE IN THE TRANSVERSE MAGNETIC-FIELD NUMERICAL-MODEL

被引：4
|
作者：
LUKYANOVA, AV
RAKHIMOV, AT
SUETIN, NV
机构：
[1] Research Institute of Nuclear Physics, Department of Microelectronics, Moscow State University, 1119899, Moscow
来源：
IEEE TRANSACTIONS ON PLASMA SCIENCE | 1991年 / 19卷 / 02期
关键词：
D O I：
10.1109/27.106814
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
A numerical model of RF discharges in a steady transverse magnetic field is developed. This model is valid in a range of parameters (gas pressure, magnetic field, RF voltage) used in a number of experimental and technical installations. The comparison between numerical calculations and some experimental results is presented.
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页码：197 / 203
页数：7
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