NUCLEAR MICROPROBE

被引：0
|
作者：
PUZYREVICH, AG
RYABCHIKOV, AI
机构：
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1990年 / 33卷 / 05期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
An apparatus for nuclear microanalysis of solid surfaces is described. Results of a study of an ion-optical system for formation of an ion beam with a diameter of approximately 10-mu-m are presented. A method is described for study of the space distribution of a microimpurity with specimen depth by means of an ion beam with a space resolution of approximately 10-mu-m along the specimen surface and of approximately 20 angstrom for depth and a sensitivity to impurities at a level of 10(-5)-10(-6%).
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页码：1203 / 1205
页数：3
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