A MICROBEAM LINE FOR MEDIUM-ENERGY ION-BEAMS

被引：15
|
作者：
TAKAI, M
MATSUO, T
KINOMURA, A
NAMBA, S
INOUE, K
ISHIBASHI, K
KAWATA, Y
机构：
[1] OSAKA UNIV,EXTREME MAT RES CTR,TOYONAKA,OSAKA 560,JAPAN
[2] KOBE STEEL LTD,CTR ELECTR TECHNOL,KOBE,HYOGO 67302,JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 45卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(90)90898-5
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A microbeam line for analysis with adjustable objective slits and a magnetic quadrupole doublet was designed and installed in a beam line connected with a medium-current ion implanter (Disktron accelerator) with an energy of 500 keV. The dependence of excitation currents and rotational misalignments for each of the magnets on the final beam spot size was investigated. The results were compared with those estimated by a Monte Carlo procedure for the final beam spot profile. A minimum beam spot size of 0.7 μm × 0.9 μm for 400 keV helium ion beams was obtained. A typical beam current was 100 pA for a spot size of 1 μm × 1 μm. Secondary-electron and RBS mapping images using the microprobe with 400 keV helium ions were obtained. © 1990.
引用
收藏
页码：553 / 556
页数：4
相关论文
共 50 条
  • [1] TRANSPORT OF LOW-ENERGY AND MEDIUM-ENERGY ELECTRON AND ION-BEAMS IN SEAWATER AND ITS VAPORS
    ERWIN, DA
    KUNC, JA
    PHYSICAL REVIEW A, 1988, 38 (08): : 4135 - 4141
  • [2] STRUCTURE-ANALYSIS OF CRYSTAL-SURFACES AND INTERFACES WITH MEDIUM-ENERGY ION-BEAMS
    FRENKEN, JWM
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 33 (1-4): : 884 - 890
  • [3] Structure analysis of crystal surfaces and interfaces with medium-energy ion beams
    Frenken, J.W.M.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1988, B33 (1-4) : 884 - 890
  • [4] MICROBEAMLINE DESIGN FOR MEDIUM TO HIGH-ENERGY HELIUM ION-BEAMS
    TAKAI, M
    MATSUO, T
    NAMBA, S
    INOUE, K
    ISHIBASHI, K
    KAWATA, Y
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 : 260 - 263
  • [5] A MULTIAPERTURE ION-SOURCE WITH ADJUSTABLE OPTICS TO PROVIDE WELL-COLLIMATED, HIGH-CURRENT-DENSITY, LOW-ENERGY TO MEDIUM-ENERGY ION-BEAMS
    RAY, MA
    BARNETT, SA
    GREENE, JE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (02): : 125 - 131
  • [6] LOW-ENERGY ION-BEAMS
    STEPHENS, KG
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1978, 11 (01): : 13 - 14
  • [7] FINE LINE LITHOGRAPHY USING ION-BEAMS
    ADESIDA, I
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 923 - 928
  • [8] THE ION OPTICS OF LOW-ENERGY ION-BEAMS
    DRUMMOND, IW
    VACUUM, 1984, 34 (1-2) : 51 - 61
  • [9] MEDIUM-ENERGY ION SPECTROSCOPY USING ION IMPLANTER
    RADZIMSKI, ZJ
    YOKOYAMA, S
    ISHIBASHI, K
    NISHIYAMA, F
    HIROSE, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1993, 32 (7A): : L962 - L965
  • [10] Medium-energy ion spectroscopy using ion implanter
    Radzimski, Zbigniew J., 1600, (32):
12345