PROPERTIES OF AMMONIA-FREE NITROGEN-SI3N4 FILMS PRODUCED AT LOW-TEMPERATURES

被引：55
|
作者：
GERETH, R
SCHERBER, W
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1972年 / 119卷 / 09期
关键词：
D O I：
10.1149/1.2404452
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1248 / &
相关论文
共 50 条
  • [1] NEW APPLICATIONS FOR LOW-TEMPERATURE AMMONIA-FREE SI3N4 FILMS
    GERETH, R
    HOLZER, H
    SCHERBER, W
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (03) : C98 - &
  • [2] GLASSY PROPERTIES OF CRYSTALLINE LI3N AT LOW-TEMPERATURES
    BAUMANN, T
    SCHICKFUS, MV
    HUNKLINGER, S
    JACKLE, J
    SOLID STATE COMMUNICATIONS, 1980, 35 (08) : 587 - 590
  • [3] TRANSFORMATION TWINS AND ELASTIC PROPERTIES OF U3SI AT LOW-TEMPERATURES
    ROSEN, M
    GEFEN, Y
    KIMMEL, G
    HALWANY, A
    PHILOSOPHICAL MAGAZINE, 1973, 28 (05): : 1007 - 1014
  • [4] MAGNETIC-PROPERTIES OF U-3AS-4 AT LOW-TEMPERATURES
    NOVOTNY, P
    STERNBERK, J
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1976, 33 (01): : K15 - K17
  • [5] INVESTIGATION OF SURFACE PROPERTIES OF EPITAXIAL N-TYPE GAAS FILMS AT LOW-TEMPERATURES
    SYTENKO, TN
    LYASHENK.VI
    TYAGULSK.IP
    SHAPOVAL, VY
    SOVIET PHYSICS SEMICONDUCTORS-USSR, 1973, 7 (02): : 258 - 261
  • [6] CALORIMETRY OF PR5SI3 AND PR5SI4 AT LOW-TEMPERATURES
    BOLGAR, AS
    GORBACHUK, NP
    BLINDER, AV
    MOISEEV, NV
    ZHURNAL FIZICHESKOI KHIMII, 1994, 68 (12): : 2124 - 2127
  • [7] CRYSTALLIZATION PROPERTIES OF HE-3-HE-4 SOLUTIONS AT LOW-TEMPERATURES
    LOPATIK, VN
    ZHURNAL EKSPERIMENTALNOI I TEORETICHESKOI FIZIKI, 1984, 86 (02): : 487 - 496
  • [8] ELECTRICAL PROPERTIES OF MAGNETITE AND MEXFE3-XO4 AT LOW-TEMPERATURES
    CONSTANTIN, C
    REVUE ROUMAINE DE PHYSIQUE, 1974, 19 (01): : 27 - 42
  • [9] PHYSICAL-PROPERTIES OF SM3SE4 AT LOW-TEMPERATURES
    FURUNO, T
    ANDO, K
    KUNII, S
    OCHIAI, A
    SUZUKI, H
    FUJIOKA, M
    SUZUKI, T
    SASAKI, W
    KASUYA, T
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1988, 76-7 : 117 - 118
  • [10] FREE-CARRIER ABSORPTION AT LOW-TEMPERATURES IN UNIAXIALLY STRESSED N-TYPE GE, SI AND GAAS
    WALTON, AK
    METCALFE, SF
    JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1976, 9 (19): : 3605 - 3625
12345