IMPLEMENTATION OF ADAPTIVE PROCESS-CONTROL TO A DRY ETCHING PROCESS

被引：1

作者：

BRESNOCK, FJ ^{[1
]}

STUMPF, T ^{[1
]}

机构：

[1] IBM DEUTSCHLAND GMBH,D-7032 SINDELFINGEN,FED REP GER

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 04期

关键词：

D O I：

10.1116/1.571534

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1027 / 1030

页数：4

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