LOW-ENERGY AR ION-BOMBARDMENT DAMAGE OF SI, GAAS, AND INP SURFACES

被引：66
|
作者：
WILLIAMS, RS [1 ]
机构：
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
来源：
SOLID STATE COMMUNICATIONS | 1982年 / 41卷 / 02期
关键词：
D O I：
10.1016/0038-1098(82)91056-0
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：153 / 156
页数：4
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