REAL-TIME, HIGH-RESOLUTION OPTICAL BEAM POSITION-SENSING DEVICE

被引：1
|
作者：
TODA, K
YOSHIDA, S
机构：
[1] Department of Electronic Engineering, National Defense Academy, Hashirimizu
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1991年 / 62卷 / 01期
关键词：
D O I：
10.1063/1.1142309
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
An optical beam position-sensing device with real-time and high-resolution abilities is described using a Pb2CrO5 thin-film lateral photodetector. A high resolution of less than 5 nm in an effective measuring range of 16-mu-m is compatible with a real-time response of up to 10 kHz. Three parallel, planar gold electrodes evaporated on the film surface in a configuration with two narrow electrode gaps are essential for sensing the position of a light beam. Relationships between photocurrent and light beam position are examined under various combinations of the electrode configuration and beamwidths. The displacement deviation at the surface of the shaft of the rotating motor is measured for a-demonstration of real-time and high-resolution position sensing.
引用
收藏
页码：217 / 222
页数：6
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