SPIN-COATABLE INORGANIC RESISTS BASED ON NOVEL PEROXOPOLYNIOBOTUNGSTIC ACIDS FOR BILAYER LITHOGRAPHY

被引：36
|
作者：
KUDO, T
ISHIKAWA, A
OKAMOTO, H
MIYAUCHI, K
MURAI, F
MOCHIJI, K
UMEZAKI, H
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 10期
关键词：
D O I：
10.1149/1.2100252
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：2607 / 2613
页数：7
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