DAMAGE CREATED IN SILICON BY BFN+(1 LESS-THAN-OR-EQUAL-TO N LESS-THAN-OR-EQUAL-TO 3) AND PFN+(1 LESS-THAN-OR-EQUAL-TO N LESS-THAN-OR-EQUAL-TO 5) IMPLANTATIONS

被引：22

作者：

GROB, A ^{[1
]}

GROB, JJ ^{[1
]}

GOLANSKI, A ^{[1
]}

机构：

[1] CTR NATL ETUD TELECOMMUN, CNS, F-38240 MEYLAN, FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷

关键词：

D O I：

10.1016/S0168-583X(87)80014-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：55 / 60

页数：6

共 50 条

[1] ISOTOPE ABUNDANCES FOR 3 LESS-THAN-OR-EQUAL-TO Z LESS-THAN-OR-EQUAL-TO 26 AND 200 LESS-THAN-OR-EQUAL-TO E LESS-THAN-OR-EQUAL-TO 500
ARENS, JF
[J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1976, 21 (04): : 541 - 541
[2] HYDROGEN INTERACTIONS IN PDHN (1 LESS-THAN-OR-EQUAL-TO N LESS-THAN-OR-EQUAL-TO 4)
WANG, XW
LOUIE, SG
COHEN, ML
[J]. PHYSICAL REVIEW B, 1989, 40 (08): : 5822 - 5825
[3] DEFORMATION, PAIRING AND PARTICLE-CORE COUPLING, 76 LESS-THAN-OR-EQUAL-TO Z LESS-THAN-OR-EQUAL-TO 81, 104 LESS-THAN-OR-EQUAL-TO N LESS-THAN-OR-EQUAL-TO 120
WOOD, JL
FINK, RW
[J]. BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1975, 20 (09): : 1185 - 1185
[4] AN ELECTRON-DIFFRACTION STUDY OF THE CDXINYA1ZS4 (0.9 LESS-THAN-OR-EQUAL-TO X LESS-THAN-OR-EQUAL-TO 1,1 LESS-THAN-OR-EQUAL-TO Y LESS-THAN-OR-EQUAL-TO 1.3, 0.7 LESS-THAN-OR-EQUAL-TO Z LESS-THAN-OR-EQUAL-TO 1) CRYSTAL-STRUCTURE
ABDULLAYEV, AG
KYAZUMOV, MG
[J]. THIN SOLID FILMS, 1990, 190 (02) : 303 - 307
[5] CONCERNING THE SOLUTION SET OF AX=B WHERE P LESS-THAN-OR-EQUAL-TO A LESS-THAN-OR-EQUAL-TO Q AND P LESS-THAN-OR-EQUAL-TO B LESS-THAN-OR-EQUAL-TO Q
HARTFIEL, DJ
[J]. NUMERISCHE MATHEMATIK, 1980, 35 (03) : 355 - 359
[6] LEVEL DENSITIES FOR 23 LESS-THAN-OR-EQUAL-TO A LESS-THAN-OR-EQUAL-TO 40
BECKERMAN, M
[J]. NUCLEAR PHYSICS A, 1977, 278 (02) : 333 - 356
[7] KINEMATICS AND DISTRIBUTION OF INTERSTELLAR HI IN THE REGION 290 LESS-THAN-OR-EQUAL-320, LESS-THAN-OR-EQUAL-TO + 3 LESS-THAN-OR-EQUAL-TO B LESS-THAN-OR-EQUAL-TO +17
OLANO, CA
[J]. REVISTA MEXICANA DE ASTRONOMIA Y ASTROFISICA, 1985, 10 : 159 - 170
[8] RANGE OF MAGNETIC ORDER IN ZR(FE1-XCOX)Y (0 LESS-THAN-OR-EQUAL-TO X LESS-THAN-OR-EQUAL-TO 1, 1.8 LESS-THAN-OR-EQUAL-TO Y LESS-THAN-OR-EQUAL-TO 2.1)
WIESINGER, G
HILSCHER, G
[J]. JOURNAL OF PHYSICS F-METAL PHYSICS, 1982, 12 (03): : 497 - 515
[9] IONIC MOLECULAR ISOMERISM IN CHLOROPHENYLPHOSPHORANES PHNPCL5-N (1 LESS-THAN-OR-EQUAL-TO N LESS-THAN-OR-EQUAL-TO 3)
ALJUBOORI, MAHA
GATES, PN
MUIR, AS
[J]. JOURNAL OF THE CHEMICAL SOCIETY-CHEMICAL COMMUNICATIONS, 1991, (18) : 1270 - 1271
[10] ZEROS OF 1ST DERIVATIVES OF BESSEL FUNCTIONS OF THE 1ST KIND, JN'(X), 21 LESS-THAN-OR-EQUAL-TO N LESS-THAN-OR-EQUAL-TO 51, 0 LESS-THAN-OR-EQUAL-TO X LESS-THAN-OR-EQUAL-TO 100
MORGENTHALER, GW
REISMANN, H
[J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION B-MATHEMATICAL SCIENCES, 1963, 67 (03): : 181 - 183

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