MICHELSON INTERFEROMETER FOR MONITORING THICKNESS OF DIELECTRIC FILMS

被引：1

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作者：

SHAH, VV

机构：

来源：

THIN SOLID FILMS | 1970年 / 5卷 / 5-6期

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D O I：

10.1016/0040-6090(70)90118-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：R51 / &

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