PARTICLE TRACES IN MICROTECHNICS .2. APPLICATIONS

被引：2

|

作者：

FISCHER, BE

SPOHR, R

机构：

来源：

NATURWISSENSCHAFTEN | 1988年 / 75卷 / 03期

关键词：

D O I：

10.1007/BF00405301

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

收藏

页码：117 / 122

页数：6

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