OPTICAL-PROPERTIES AND MICROSTRUCTURE OF REACTIVELY SPUTTERED INDIUM NITRIDE THIN-FILMS

被引：36
|
作者：
SULLIVAN, BT
PARSONS, RR
WESTRA, KL
BRETT, MJ
机构：
[1] UNIV ALBERTA,DEPT ELECT ENGN,EDMONTON T6G 2G7,ALBERTA,CANADA
[2] UNIV BRITISH COLUMBIA,DEPT PHYS,VANCOUVER V6T 2A6,BC,CANADA
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 08期
关键词：
D O I：
10.1063/1.341326
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4144 / 4149
页数：6
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