FACING TARGETS SPUTTERING SYSTEM FOR DEPOSITING CO-CR PERPENDICULAR MAGNETIC RECORDING MEDIA

被引：4

|

作者：

NIIMURA, Y

NAOE, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.574143

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

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页码：109 / 110

页数：2

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