ZINC-OXIDE-ON-SILICON SURFACE ACOUSTIC-WAVE RESONATORS

被引：13
|
作者：
MARTIN, SJ
GUNSHOR, RL
PIERRET, RF
机构：
来源：
APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 08期
关键词：
D O I：
10.1063/1.92045
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：700 / 701
页数：2
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