UNIFORMITY MAPPING IN ION-IMPLANTATION .2.

被引：0
|
作者：
YARLING, CB
JOHNSON, WH
KEENAN, WA
LARSON, LA
机构：
[1] PROMETRIX CORP,SANTA CLARA,CA
[2] NATL SEMICOND CORP,SANTA CLARA,CA 95051
来源：
SOLID STATE TECHNOLOGY | 1992年 / 35卷 / 03期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Part I of this article (SST, December 1991) reviewed the history of ion implant uniformity mapping. In Part II, presently available equipment and techniques are reviewed and their capabilities summarized.
引用
收藏
页码：29 / 32
页数：4
相关论文
共 50 条
  • [1] THE HISTORY OF UNIFORMITY MAPPING IN ION-IMPLANTATION
    YARLING, CB
    KEENAN, WA
    LARSON, LA
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4): : 235 - 242
  • [2] UNIFORMITY MAPPING IN ION-IMPLANTATION .1.
    YARLING, CB
    JOHNSON, WH
    KEENAN, WA
    LARSON, LA
    [J]. SOLID STATE TECHNOLOGY, 1991, 34 (12) : 57 - 61
  • [3] ION-IMPLANTATION .2. ION-IMPLANTATION IN NONELECTRONIC MATERIALS
    DEARNALEY, G
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 24-5 : 506 - 511
  • [4] ION-IMPLANTATION UNIFORMITY MEASUREMENTS
    SEIRMARC.JA
    KEENAN, WA
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (08) : C239 - C239
  • [5] EFFECT OF ION-IMPLANTATION ON CORROSION BEHAVIOR OF PURE IRON .2. CHROMIUM ION-IMPLANTATION
    ASHWORTH, V
    BAXTER, D
    GRANT, WA
    PROCTER, RPM
    [J]. CORROSION SCIENCE, 1976, 16 (10) : 775 - 786
  • [6] DOSE ACCURACY AND DOPING UNIFORMITY OF ION-IMPLANTATION EQUIPMENT
    PERLOFF, DS
    GAN, JN
    WAHL, FE
    [J]. SOLID STATE TECHNOLOGY, 1981, 24 (02) : 112 - 120
  • [7] A NEW METHOD FOR THE EXPRESS MONITORING OF THE DOSE AND UNIFORMITY OF ION-IMPLANTATION
    LIPKES, MY
    MARTYNOVA, ED
    SIMONOV, VV
    [J]. MEASUREMENT TECHNIQUES USSR, 1993, 36 (12): : 1384 - 1387
  • [8] ONLINE MEASUREMENT OF THE SPATIAL DOSE UNIFORMITY IN ION-IMPLANTATION PROCESSES
    STIEHLER, T
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 31 (04): : 563 - 566
  • [9] EFFECTS OF ION-IMPLANTATION ON THE DISSOLUTION OF MINERALS .2. SELECTIVE DISSOLUTION
    PETIT, JC
    DRAN, JC
    DELLAMEA, G
    [J]. BULLETIN DE MINERALOGIE, 1987, 110 (01): : 25 - 42
  • [10] ION-IMPLANTATION AND CATALYSIS - ELECTROCHEMICAL APPLICATIONS OF ION-IMPLANTATION
    WOLF, GK
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 875 - 885
12345