ANALYSIS OF IMPURITY DISTRIBUTION IN HOMOEPITAXIAL N ON N+ FILMS OF GAAS WHICH CONTAIN HIGH-RESISTIVITY REGIONS

被引：33

|

作者：

DILORENZO, JV

MARCUS, RB

LEWIS, R

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1971年 / 42卷 / 02期

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D O I：

10.1063/1.1660088

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：729 / +

页数：1

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