MO-SI SCHOTTKY BARRIER BY DC PLASMA SPUTTERING METHOD

被引：1
|
作者：
MIYAMOTO, S
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1969年 / 8卷 / 09期
关键词：
D O I：
10.1143/JJAP.8.1165
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1165 / &
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