SPUTTERING OF ZINC-COPPER SYSTEM DURING ATOMIC DIFFUSION

被引：2
|
作者：
ABBATI, I [1 ]
BRAICOVICH, L [1 ]
DEMICHELIS, B [1 ]
机构：
[1] CNR, GRUPPO NAZL STRUTTURA MATERIA, I-20133 MILAN, ITALY
来源：
PHYSICS LETTERS A | 1978年 / 67卷 / 5-6期
关键词：
D O I：
10.1016/0375-9601(78)90349-3
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：413 / 415
页数：3
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