DEPOSITION PROFILE SIMULATION USING DIRECT SIMULATION MONTE-CARLO METHOD

被引：0

作者：

IKEGAWA, M ^{[1
]}

KOBAYASHI, J ^{[1
]}

机构：

[1] HITACHI LTD,MECH ENGN RES LAB,TSUCHIURA,IBARAKI 300,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 03期

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D O I：

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中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：C128 / C128

页数：1

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