SURFACE INTERACTIONS OF FLUOROZIRCONATE GLASS WITH LOW-ENERGY IMPLANTED AR-IONS, N-IONS AND O-IONS

A fluorozirconate glass was implanted with 15 ke V Ar, N and O ions. The implanted samples were characterized with optical spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction, scanning electron microscopy and water corrosion tests. The surface of Ar-ion implanted glass was depleted in fluorine and enriched with metallic zirconium precipitate. It was electrically conductive and susceptible to water corrosion. The N-ion implantation induced metallic zirconium and zirconium nitride formation as well as F depletion. The N-ion implanted surface was also conductive but strong against water corrosion. The oxyfluoride surface layer formed by O-ion implantation showed little influence on optical and electrical properties of the glass, and was highly durable against water corrosion. The significant dependence of the surface properties on implanted species is discussed with consideration of both physical andchemical features of incident ions. © 1991, Taylor & Francis Group, LLC. All rights reserved.