FLUX MEASUREMENT OF A HYPERTHERMAL ATOMIC OXYGEN BEAM

被引：7
|
作者：
DAVIDSON, MR [1 ]
HOFLUND, GB [1 ]
OUTLAW, RA [1 ]
机构：
[1] NASA,LANGLEY RES CTR,HAMPTON,VA 23665
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1993年 / 11卷 / 01期
关键词：
D O I：
10.1116/1.578714
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A method has been developed and is described for measuring the flux of a beam of hyperthermal oxygen atoms using a quadrupole mass spectrometer. The accuracy of this method has been assessed by adsorbing the O atom flux on a Au surface for a specified period of time and quantifying the adsorbed amount using ion scattering spectroscopy and by estimating the oxygen-atom flux from the electron stimulated desorption parameters used to produce the oxygen-atom beam.
引用
收藏
页码：264 / 266
页数：3
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