CORNER UNDERCUTTING IN ANISOTROPICALLY ETCHED ISOLATION CONTOURS

被引：0
|
作者：
ABUZEID, MM [1 ]
机构：
[1] EINDHOVEN UNIV TECHNOL,5600 MB EINDHOVEN,NETHERLANDS
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 03期
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D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：C98 / C99
页数：2
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