HIGH-TEMPERATURE SUPERCONDUCTING FILMS BY RF MAGNETRON SPUTTERING

被引:20
|
作者
KADIN, AM [1 ]
BALLENTINE, PH [1 ]
ARGANA, J [1 ]
RATH, RC [1 ]
机构
[1] CVC PROD INC,ROCHESTER,NY 14603
关键词
D O I
10.1109/20.92799
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:2437 / 2440
页数:4
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