EFFECT OF AN EIGENSTRAIN ON SLOW VISCOUS-FLOW OF COMPRESSIBLE FLUID FILMS

We present a general formulation of the mechanics of slow viscous flow of slightly compressible fluid films in the presence of an eigenstrain. An eigenstrain represents a constrained volume change due to temperature, concentration of a dissolved species, or a chemical transformation. A silicon dioxide film grown on a silicon surface is an example of a viscous fluid film that is affected by a constrained volume change. We obtain a general expression for pressure in a fluid film produced by a surface chemical reaction accompanied by a volume change. This result is used to study the effect of an eigenstrain on viscous stress relaxation in fluid films.