RAMAN-SPECTRA OF DIAMONDLIKE AMORPHOUS-CARBON FILMS

被引：256
|
作者：
YOSHIKAWA, M [1 ]
KATAGIRI, G [1 ]
ISHIDA, H [1 ]
ISHITANI, A [1 ]
AKAMATSU, T [1 ]
机构：
[1] TORAY IND INC,ELECTR & IMAGING MAT RES LAB,OTSU,SHIGA 520,JAPAN
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 11期
关键词：
D O I：
10.1063/1.342063
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：6464 / 6468
页数：5
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