DYNAMICS AND CONTROL OF THE CZOCHRALSKI PROCESS .1. MODELING AND DYNAMIC CHARACTERIZATION

被引：46
|
作者：
GEVELBER, MA
STEPHANOPOULOS, G
机构：
来源：
JOURNAL OF CRYSTAL GROWTH | 1987年 / 84卷 / 04期
关键词：
D O I：
10.1016/0022-0248(87)90056-X
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：647 / 668
页数：22
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