DIGITAL PROCESSING OF VLSI CIRCUIT IMAGES OBTAINED FROM A SCANNING ELECTRON-MICROSCOPE

被引：0
|
作者：
ZOLGHADRASLI, A
机构：
[1] 73000 Chambery
来源：
IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS | 1990年 / 37卷 / 06期
关键词：
D O I：
10.1109/31.55042
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we discuss image deformation of VLSI circuits obtained from a scanning electron microscope (SEM). The aim of our work is to detect and correct such deformations and obtain a perfect image for comparison (correlation) with the mask descriptions provided by CAD tools for automatic test of circuits. © 1990 IEEE
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页码：824 / 827
页数：4
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