PATTERNING OF HIGH-TC SUPERCONDUCTOR FILMS WITH A FOCUSED EXCIMER LASER

被引：0
|
作者：
HAGERHORST, JM
MANNHART, JD
OPRYSKO, MM
SCHEUERMANN, MR
TSUEI, CC
机构：
来源：
LASER- AND PARTICLE-BEAM CHEMICAL PROCESSES ON SURFACES | 1989年 / 129卷
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暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
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页码：347 / 352
页数：6
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