STUDY OF ION-BEAM INDUCED MIXING DURING SPUTTER DEPTH PROFILING OF THIN-FILMS BY LEIS

被引：11
|
作者：
PURANIK, SG
KING, BV
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1988年 / 34卷 / 01期
关键词：
D O I：
10.1016/0168-583X(88)90371-0
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：102 / 112
页数：11
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