A SCANNING ION MICROBEAM SYSTEM WITH A LIQUID-METAL ION-SOURCE

被引：0
|
作者：
MITTENBACHER, J
MUHLE, R
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1989年 / 112卷 / 02期
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D O I：
10.1002/pssa.2211120252
中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：825 / 828
页数：4
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