STRUCTURAL-CHANGES AND CRYSTALLIZATION OF AMORPHOUS HYDROGENATED SILICON GENERATED BY LASER IRRADIATION

被引：30
|
作者：
ABDULHALIM, I [1 ]
BESERMAN, R [1 ]
WEIL, R [1 ]
机构：
[1] TECHNION ISRAEL INST TECHNOL,INST SOLID STATE,IL-32000 HAIFA,ISRAEL
来源：
PHYSICAL REVIEW B | 1989年 / 39卷 / 02期
关键词：
D O I：
10.1103/PhysRevB.39.1081
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1081 / 1091
页数：11
相关论文
共 50 条
  • [1] Laser crystallization and structural characterization of hydrogenated amorphous silicon thin films
    Toet, D
    Smith, PM
    Sigmon, TW
    Takehara, T
    Tsai, CC
    Harshbarger, WR
    Thompson, MO
    JOURNAL OF APPLIED PHYSICS, 1999, 85 (11) : 7914 - 7918
  • [2] CRYSTALLIZATION OF HYDROGENATED AMORPHOUS-SILICON FILMS BY PULSED RUBY-LASER IRRADIATION
    LEE, HW
    LEE, TD
    PARK, CO
    HA, DH
    KIM, JK
    OPTICS COMMUNICATIONS, 1989, 70 (02) : 119 - 122
  • [3] Photoinduced structural changes in hydrogenated amorphous silicon
    Shimizu, K
    Tabuchi, T
    Hattori, K
    Kida, H
    Okamoto, H
    AMORPHOUS AND MICROCRYSTALLINE SILICON TECHNOLOGY-1998, 1998, 507 : 735 - 746
  • [4] FORMATION OF DEFECTS IN AMORPHOUS HYDROGENATED SILICON BY LASER IRRADIATION
    CHUKICHEVA, GM
    ZARIFYANTS, YA
    KARYAGIN, SN
    KASHKAROV, PK
    PETROV, AV
    SOVIET PHYSICS SEMICONDUCTORS-USSR, 1984, 18 (10): : 1183 - 1184
  • [5] PHOTOINDUCED STRUCTURAL-CHANGES ASSOCIATED WITH THE STAEBLER-WRONSKI EFFECT IN HYDROGENATED AMORPHOUS-SILICON
    FRITZSCHE, H
    SOLID STATE COMMUNICATIONS, 1995, 94 (12) : 953 - 955
  • [6] Computational model of pulsed-laser irradiation of hydrogenated amorphous silicon with phase changes
    Z Angew Math Mech ZAMM, suppl 5 (99):
  • [7] LIQUID PHASE LASER CRYSTALLIZATION OF HYDROGENATED AMORPHOUS SILICON.
    Bao Ximao
    Yang, Min
    1600, (06):
  • [8] Laser crystallization of compensated hydrogenated amorphous silicon thin films
    Saleh, R.
    Nickel, N. H.
    Maydell, K. V.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (9-20) : 1003 - 1007
  • [9] Crystallization of amorphous hydrogenated silicon (a-Si:H) films under irradiation with femtosecond laser pulses
    Belik, V. P.
    Vasyutinskii, O. S.
    Kukin, A. V.
    Petrov, M. A.
    Popov, R. S.
    Terukov, E. I.
    TECHNICAL PHYSICS LETTERS, 2016, 42 (08) : 788 - 791
  • [10] Crystallization of submicron amorphous hydrogenated silicon films with different hydrogen concentration by nanosecond ruby laser irradiation
    Krivyakin, G. K.
    Kamaev, G. N.
    Ivlev, G. D.
    Prakopyeu, S. L.
    Volodin, V. A.
    JOURNAL OF LASER APPLICATIONS, 2019, 31 (01)
12345