ION-BOMBARDMENT EFFECT ON SI HOMOEPITAXIAL GROWTH FROM ION MOLECULAR-BEAMS

被引：3
|
作者：
PUGACHEVA, TS
SAIDOV, MS
LUTOVICH, AS
机构：
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1987年 / 105卷 / 1-2期
关键词：
D O I：
10.1080/00337578708210067
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
引用
收藏
页码：117 / 131
页数：15
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