OPTICAL FEEDBACK DURING CW LASER ANNEALING OF SILICON DETECTED BY SEM-EBIC

被引：0

作者：

JOHANSEN, H ^{[1
]}

LAMMEL, B ^{[1
]}

机构：

[1] INGN HSCH MITTWEIDA,MITTWEIDA,GER DEM REP

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1987年 / 104卷 / 02期

关键词：

D O I：

10.1002/pssa.2211040251

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：K83 / &

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